Keywords
Abstract
Ushbu ilmiy tadqiqot ishida qalay (IV) oksidi (SnO₂) asosidagi shaffof o‘tkazuvchi yupqa plyonkalarning xossalari va ularni olish texnologiyalari tahlil qilinadi.
Materialning yuqori optik shaffofligi, keng taqiqlangan zona kengligi hamda kimyoviy va termik barqarorligi uning sensor va optoelektron qurilmalarda qo‘llanishini belgilashi ko‘rsatilgan. Zol–gel, sprey piroliz, CVD, magnetronli purkash va PLD usullarining xususiyatlari yoritilib, taglik harorati, termik ishlov muhiti va qalinlikning kristallanish, donacha o‘lchami hamda elektr o‘tkazuvchanlikka ta’siri bayon etilgan. Texnologik parametrlarni nazorat qilish plyonkalarning funksional xossalarini optimallashtirishda muhim omil ekani ta’kidlanadi.
References
Batzill M., Diebold U. The surface and materials science of tin oxide. Prog. Surf. Sci., 79, 47–154 (2005).
Gurlo A. Nanosensors: towards morphological control of gas sensing activity. SnO₂ materials, ChemPhysChem, 7, 2041–2052 (2006).
Minami T. Transparent conducting oxide semiconductors for transparent electrodes. Semicond. Sci. Technol., 20, S35–S44 (2005).
Barsan N., Weimar U. Conduction model of metal oxide gas sensors. J. Electroceram., 7, 143–167 (2001).
Kim H. et al. Transparent conducting SnO₂ thin films. J. Appl. Phys., 86, 6451–6461 (1999).
Choi Y. et al. Effect of oxygen vacancies in SnO₂ films. Thin Solid Films, 518, 624–628 (2010).